SemiconFab
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SemiconFab is a source-available digital twin of a 300mm semiconductor fab. It combines a 3D cleanroom and device models, a catalog of 153 OEM equipment records across 13 process categories, and the MIMAC-2026 scheduling benchmark with 217 machines. The license is PolyForm Noncommercial, so commercial use needs a separate license.
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semiconductordigital-twinsimulationbenchmark3dfab
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